Temperature control accuracy 0.5-1K atmosphere type high-temperature probe station successfully installed

Recently, we successfully installed an atmosphere type high-temperature probe station at a research institute in Hefei. The probe station was designed and manufactured strictly according to the customer's usage requirements, and received full approval from the customer.

Technical Indicators:

1. Temperature range: room temperature -350 ℃;

2. Temperature control accuracy: 0.5-1K, which is related to the stability of the water temperature in the sample stage's water cooling circuit, and should be minimized as much as possible.

3. Sample table size: 51mm

4. Standard K-type thermocouple

5. Vacuum degree: 10E-3Pa;

6. Provide 1 vacuum suction port, 1 gas inlet, and 1 vacuum release port;

7. Matching observation window: 1

8. Matching probe arms: 2; Probe arm movement accuracy: 10 μ m; Needle tip: 1 μ m; Probe movement range: ± 12.5mm;

9. Leave 2 additional probe arm interfaces for backup;

10. Sample stage water cooling circuit;

11. Probe arm interface: Vacuum type 3-axis interface, all electrical circuits adopt shielding design, testing accuracy: pA

12. Sample: 51mm, minimum 1mm, minimum electrode 100um

13.4 liters of vacuum, 1 unit, 1 microscope