High temperature magnetic field heating system successfully installed

Recently, our company successfully installed a high-temperature magnetic field heating system for a technology enterprise in Jiangsu.

Main technical indicators:

※ Temperature range: Room temperature -350 ℃ (temperature on the silicon wafer)

Temperature control accuracy: ± 1 ℃

※ Temperature resolution: 0.1 ℃

Sample size: 8 inches (requires fixed fixtures, and also requires separate fixation for 10mm x 10mm and 20mm x 20mm samples)

※ Sample temperature: Place a separate thermometer on the precision circle to measure the surface temperature of the precision circle (the thermometer is packaged in a gold-plated oxygen free copper block, and the copper block contacts the precision circle for temperature measurement. Use a relatively thin flexible wire for easy movement and measurement)

※ Magnetic field strength:>1000oe (magnetic field at the sample testing location)

※ Continuous working time: 5 hours

Sample table size: 210mm (can be changed according to actual conditions, not less than 8 inches),

The sample stage adopts a three-dimensional movement method, with a movement stroke of ± 110mm and a movement accuracy of 10um

The main components of the sample stage are made of high-quality non-magnetic alloys;

At room temperature to 350 degrees, the heating rate is better than 10K/min, and the maximum heating temperature is 350 ℃; Temperature control accuracy: ± 1 ℃;

During heating, the heating wire is encapsulated in a quartz tube, greatly reducing the contamination of surface attachments caused by the evaporation of the heating wire;

※ Matching magnet power supply: bipolar, stability better than ± 25ppm/h, smooth zero crossing without breakpoints;

※ Matching electromagnet: Long term stability<± 0.5Gs;

※ Cooling method: Natural cooling.